Semiconductor Packaging
Legacy Semiconductor
8039 SW Cirrus Dr, Beaverton, OR 97008, United States
About Legacy Semiconductor
Legacy Semiconductor operates from Beaverton, Oregon, as a re-manufacturer of plasma etch systems for the semiconductor industry. The company focuses on Tegal 901e, 903e, and 915 equipment, offering refurbished systems and a full line of spares and repair parts. Its core activity centers on restoring Tegal 9XX series etchers and resist strippers, including oxide, nitride, and polysilicon etchers as well as single- and batch-wafer ashing systems such as the Tegal 915. The shop supplies preventive-maintenance kits, upgrade and conversion packages, and tooling, while also performing repairs on RF match networks, printed circuit boards, and module rebuilds. Field service and operator training round out the service portfolio. The customer base spans semiconductor fabrication facilities that rely on legacy Tegal platforms, though the company does not name specific clients. By providing new spares at prices below original-equipment levels, it supports fabs extending the life of installed tools. Legacy Semiconductor positions itself as a cost-effective alternative to OEM support, emphasizing a complete parts inventory and in-house expertise on Tegal systems.
Manufacturing capabilities
Core processes
Finishing & coating
Industries served
Semiconductor industry
Products
- Illustrated Parts Guides
- Complete Tegal Parts List
- Solenoid Valve Assembly
- Control Panel Assembly
- Assembly Porter
Equipment
- Tegal 901e
- Tegal 903e
- Tegal 915 system
- Tegal 9XX Series Etchers
Company details
- Location
- Beaverton, Oregon
- Company type
- Manufacturer
Frequently asked questions
Where is Legacy Semiconductor located?
Legacy Semiconductor is located at 8039 SW Cirrus Dr, Beaverton, OR 97008, United States.
What does Legacy Semiconductor do?
Legacy Semiconductor is listed under Semiconductor Packaging, and its listed capabilities and products include Plasma etch system re-manufacturing, Refurbished systems, Spares & repair parts, Preventive maintenance kits, Upgrades and Conversion kits.
What industries does Legacy Semiconductor serve?
Legacy Semiconductor lists Semiconductor industry among the industries it serves.
How do I request a quote from Legacy Semiconductor?
Use the Request a quote button on this page to send Legacy Semiconductor your requirements through FirmsLedger, or call (503) 644-3222 and visit legacysemi.com.
What companies are similar to Legacy Semiconductor?
Other Semiconductor Packaging companies in Oregon listed on FirmsLedger include Nordic Semiconductor, Inc, SiCamore Semi and JSR Micro.